Furnace structure & Vacuum Chamber | Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frame The chamber is made of high purity fused quartz tube Quartz tube size: 11" OD/10.8" ID x 9" H The vacuum flanges are made of Stainless Steel 316 |
Vacuum Flanges | Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves Flange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump (vacuum pump is not included, please order separately) One digital vacuum gauge is installed on the top flange. Precision annti-corrosion digital vacuum gauge is optional at extra cost |
Gas Flow Meters | Gas mixer integrated with two float-meters with adjustable measurement ranges of: 16 -160 mL/m 500 - 5000 mL/m (for purging purpose) |
Heater and Sample Holder | Two independently controlled heaters with manually adjustable gap from 2 - 30 mm 20 pcs Halogen lamps are used as heating element for rapid thermal processing. Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling. 5" dia. circular wafer holder is built into top heater for holding substrate. One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of substrate to make it heat uniformly). A 16L/min recirculating water chiller is included for saving water source |
Temperature Controller | Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters Each controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken |
Working Temperature | Max. temperature for each heaters: <= 800ºC Max. temperature difference between two heaters: <= 300ºC depends on spacing between two heaters: Spacing 30mm Max. temp difference: 315ºC @ heating bottom only |
Heating & Cooling Rate | Heating: > 8ºC/s ( heating single heater only ) Cooling: > 10ºC/s (600 - 100ºC) Max. |
Thermal Couple | Two K-type thermal couples are installed on top and bottom heaters separately |
Working Voltage | 208 - 240VAC, single phase, 20A air breaker |
Power Requirement | 2200W total ( 1100W for each heater ) |
Warranty | One year limited with life time support |
Dimensions | 1085mm L x 680mm W x 1710mm H |
